Products » Other

    Kit, Retrofit Dual · 00-685045-00

    Load Lock Manifold · 00-684375-00

    Roller, Flat Aligner · 00-678772-03

    Roller, Flat Aligner · 00-678302-01

has picture   Wafer Stop Blade, 5" · 00-678302-02

    TC, Vac Gauge · 270006

    Absorber, Ebara · 31302000

    Regulator, 0-30 PSI · 41500777

    Spray Lubricant · G-n

    Insulator · 00-641737-05

    Pressure Plate, Assy. · 00-684169-00

    Mount, Clip Cylinder · 00-664343-00

has picture   Wafer Pick Up · 00-678317-01

    Clamp · 00-664080-06

    Cover, Blank Off · 00-664231-00

  exchange item Heater Assy., 5" SST · 00-685996-00

  exchange item RF Match Box Assy. · 00-671684-01

  exchange item RF Etch Head · 00-674880-00

has picture   Pressure Plate RF Hue Bias · 00-685582-00

has picture   Transfer Plate Assy., 5" · 00-674776-00

  exchange item Heater Assy., 5" · 00-684878-00

    Bellows Assy. · 09-530119-00

    Lock Cylinder Assy. W/Key · 00-670594-00

  exchange item Source, Conmag Assy. · 00-664224-02

    Pressure Plate Assy. · 00-683162-00

    Transfer Plate Assy. · 00-683141-00

    Shaft, LL Ram · 00-684096-00

    Insulator, Etch Ring · 00-684291-00

has picture   Insulator, Anode · 00-664167-00

    Adapter, TC Gauge · 00-672017-00

    TC, Vacuum · 00-672017-01

    Tube, Inlet, Argon · 00-672117-00

has picture   Insulator, Cathode · 00-664166-00

    Chain, Drive · 20-480079-00

    Cassette Rail, Rear · 00-672813-00

    T.C, Self Adhecive · SA1-J

    Mask, CV, 5" · 00-677813-02

    Felt, Oil Reserve · PM033759-T

    Air Filter Muffler · 00-671946-00

    Gas Feed Transition Tube · 00-677955-01

    Insert Rail, Rear · 00-674274-00

    Insert Rail, Front · 00-674275-00

    Table Shield · 00-674330-00

  exchange item Heater, DC Bias 5" · 00-685943-01

    Roller, Flat Aligner · 00-678761-03

    Roller, Flat Aligner · 00-678772-01

    Roller, Flat Aligner · 00-678761-01

    Cassette, Wafer 4" · 00-664394-00

    Floodlight, Large · 67-489007-00

has picture   Table, Insert. 5" · 00-674830-00

has picture   Screen, Cryo Pump · 00-674850-00

    Trap, RST-40V · 99-171-137

    Heater Sieve Trap · F2698301

    L/L Ram Seal Plate · 00-664440-01

    Rebuild Kit, Valve · 33-0119

    Tube, Assy. · 00-685918-00

    Mask Assy. CV Upgrade · 00-677908-06

has picture   Bellows, LL Ram · 00-678274-01

has picture   Wafer Stop Blade, 6" · 00-678304-02

has picture   Insulator, Mini-Qtm · 04-712078-02

    Insert, Perforated · 00-678477-01

has picture   Tube Assy, Flex, Etch · 00-678552-01

    Screen, AY Millitorr · 00-626269-00

    Argon Tube Assembly · 00-678635-01

    Fan · SU2A5

    Wafer Lifter, 6" · 00-680534-00

    Mesh Trap · 00-685579-00

    Blank Off, Source · 00-680616-00

    Plate, L/L Ram Seal · 00-680074-02

    Cassette Rail Insert, Front · 00-680918-00

    Cassette Rail, Front · 00-680919-00

    Cassette Rail Insert, Rear · 00-680920-00

    Screen · 00-681084-00

    Cassette, 6" Wafer · 00-681359-00

has picture   Insert, External Pole Piece · 00-682232-00

has picture   Insert, Middle Pole Piece · 00-682237-00

    Heat Distribution Plate · 00-682547-00

    Insulator, 6" Heater · 00-682548-00

    Insulator, Pressure · 00-674827-00

    Insulation Material, Heater · 00-682550-00

    Insulator, RF Ceramic · 00-682884-00

    Screen, Hi-Vac Valve · 00-683293-00

    Insert, Table, RF Etch · 00-683445-04

    Panel · 00-683695-01

has picture   Wafer Stop Blade, 5" SST · 00-674693-00

    Motor, DC · 73-410205-00

    Kit, Water Pump 1050 Cyropanel · 8080021K001

    Kit, Water Pump 1050 Cyropanel · 8080021K002

    Kit, Water Pump 350 Cyropanel · 8080021K003

has picture   Wafer Stop Blade, 4" · 00-678303-02

    Plt Mounting · 04-709285-01

    Screen, L/L ISO Valve · 00-684408-00

    Kit B · 00-672744-00

    Screen, L/L · 00-684689-00

has picture exchange item Rotational Feedthru · 00-684755-00

    Cap, Ignitor · 00-677829-02

    Rotor Assembly · 00-685098-00

    Light, Assembly KWR · 00-685388-00

    Shield, Ceramic, Heater T.C. · 00-685917-00

    Bar Pallet · 00-688156-00

    Pump, Cryo FS-8 · 03-230055-00

    Molecular Sieve Material · 27-320035-00

    Bellows, Seal Body · 04-710424-01

    Insert Clip Ring · 04-714075-01

    Tube, Ion Gauge · K2500-301

    Plate, Temperature · 101-4-177C

    Wafer Lifter Arm · 10-98800-01

    Bellows, Assembly · 1281-187838-301

    Hex Nut, 8, SS · 13-122008-00

    Master Link 3/8 · 20-479930-00

    Belt, Plastic Drive · 20-480029-00

    Belt, Timing · 20-480081-00

    Key · 22-999783-00

    Plunger, Vilier · 22-999842-00

    Line, Argon, ViPS · 28-200704-00

    Hose Clamp · 28-993144-00

    Cryo Pump Hose · 3130020E

  exchange item Pump, Turbo, Varian · V-200A

    Cover, Transducer Back · 71-625047-00

    Heater Element, 6" · 73-290938-00

    Filter Valve · 80250K031

    Kit, Rebuild 15K Array · 8080002K010

    Manual Valve · 951-5091

    Oil, TA, Turbo · 969-9901

    5" Flange Extension · 952-5048

    Rotor, Proteus · P-100

    Regulator, Pressure, L/L Valve · SP2339-1

    Cassette Rail Front · 00-672814-00

    Array, 1st Stage · 07-601429-00

    Cable, 10 · 27-299955-00

    Wafer Load Door, 5" · 00-684170-00

    Wafer Lifter, 5" · 00-674691-00

has picture   Cassette, Wafer 5" · 00-684088-00

has picture   Cooling Band, Outer · 00-682205-00

has picture   Cooling Band, Inner · 00-682211-00

has picture   Heater, 3290 5" SST · 04-716542-01