Varian 3180/90 & 3290 System Rebuild Specifications

The following components are replaced new:

  • All O'rings, Quad rings & gaskets
  • All water hose plumbing
  • All pneumatic hose plumbing
  • All vacuum hose plumbing
  • Switches and switch actuators for doors, rams, & elevators
  • Thrust washers, (10)
  • Shoulder screws, (5)
  • Needle bearings, (5)
  • Sprocket, (5)
  • Cassette drive chain
  • All bearings
  • All gas valve stems & seats
  • All ceramic rings
  • Conmags, (anode ceramic rings)
  • Quantum's, (rotation bearings)
  • Cassette optical sensor, (3)
  • Flat aligner drive belts, (4)
  • Wafer sense cable
  • Wafer detect illumination lamp
  • Elevator valve and solenoid
  • Anti rotation strap
  • Pancake cylinder, pressure plate ram back
  • Proteus flow switch rotors, (4)
  • Air silencer
  • 35 PSI switches, (3)
  • V9A - high vacuum valve solenoid 41E1
  • V9 cylinder rebuild kit, (includes new bellows seal & O'ring
  • Cryo pump screen
  • All chamber stainless steel screws, nuts, washers & Turner washers
  • Ion gauge tube
  • Ion gauge cable
  • Thermocouple gauge tubes, (3)
  • Wafer clips, (20)
  • Spring ring retainers, (10) / Spring ring shield retainers, (10)
  • Anode caps, (3) & anode shield, (3)
  • Vacuum switch 10HG
  • Sieve trap material
  • Compressor absorber
  • All cooling fans that are inoperative will be replaced with new

Items inspected (Components replaced or repaired if worn or damaged):

  • Heater elements
  • Coaxial feed thru
  • Shutter feed thru assemblies
  • Solenoid valves, (check & replace if damaged or broken)
  • Proteus flow switches
  • Conmag source gun assemblies
  • Wafer handler & flat aligner
  • Wafer load door
  • Front plate
  • Rear plate
  • Door actuator air cylinders
  • Vacuum valves, (16)
  • V9 - High vacuum gate valve assembly
  • Vacuum plumbing system & manifold
  • Vacuum chamber, stripped cleaned & rebuilt
  • Pressure plate and load lock rams
  • Pressure plate
  • Transfer plate
  • All plumbing - pneumatic, water & vacuum
  • RF head & RF igniter, (if applicable)

Paint

All panels, system exterior & frame painted to OEM specifications with Polyurethane paint.

Plexiglas

All Plexiglas replaced

Items sent out for chemical cleaning

All internal chamber shielding

Items sent out for rebuild / calibration

  • Capacitance Manometer
  • Mechanical pump
  • Cryo pump

Final system qualifications

  • Helium leak check complete system
  • Argon line qualifications to, < 5.0x10-7
  • Ensure pressure integrity, < 5.0x10-7
  • Align wafer-handling system
  • Set MKS zero & span, (250B controller)
  • Pressure check all water plumbing
  • Check heaters to 400 Deg. C in < 10 minutes and stable +/- 5%
  • Set-up Argon system, (strike, normal and overpressure)
  • Calibrate Conmag power supplies and signal distribution
  • Test and calibrate RF power supply, (if applicable)
  • Calibrate controllers, sensors and system power supplies
  • Run 100 wafers with no errors
  • Supply metal uniformity and specularity monitors to customer
Note: Customer to supply target(s) and monitor material